Flat Panel Display Rotary Sputtering Target

Comparing with planar targets, rotary target can achieve 70~80% utilization ratio, increase the deposition speed, reduce redeposition and arcing.  TTMC produce high purity of Al, Mo, Cu, Ti, Ag, Ni alloy, Si and Nb₂O_x rotary targets for display panel, touch panel and low-E glass.

The Al and Mo have been certified for generation 8.5 production line and became the first rotary target manufacturer for large size TFT-LCD industries in Taiwan.

Application

• Drive electrode: Al (99.999%), Mo, Cu, Ti
• Diffusion Barriers: Mo
• Low-E glass: Ag, Ni alloy
• Anti-reflection: Nb₂O_x, Si

Product Advantages

• Well management of high purity raw material resource and processing, fully in-house and quality control.
• High market share and stable supply for generation 5.5 to 10.5 TFT-LCD panel.

• High strength special bonding metal.